US fears ASML EUV machine reached China, but ASML denies it

US Commerce Secretary Howard Lutnick has raised concerns that one of ASML’s most advanced EUV machines may have ended up in China. ASML, the Dutch company that is the only maker of those extreme ultraviolet lithography tools, says none of its EUV machines are in China.

Historically, ASML’s top systems have been supplied to US or US-friendly firms such as TSMC, Intel and Samsung. Bloomberg reported that anonymous senior US administration officials claim to have evidence ASML exported EUV tools to China, though that evidence has not been made public.

ASML replied that it engages openly with governments, recognizes the national security considerations behind export controls, and is fully committed to complying with all applicable regulations. The company also says it has previously refuted several unfounded rumors about non‑compliance that were inaccurate and damaging to its reputation.

China, United States

asml, euv, lithography, china, export controls, howard lutnick, tsmc, intel, samsung, bloomberg